About: http://webisa.webdatacommons.org/436504230

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The direct write laser would expose the unexposed photo-resist on a designated area of the die 104 with such information as device, lot number, wafer number and die number or some other designator that can be translatedto die level.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com