About: http://webisa.webdatacommons.org/439204912

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	RHEED systems are used to measure or monitor crystal structure or crystal orientation of epitaxial thin-films of silicon or other materials.
http://www.w3.org/ns/prov#wasQuotedFrom	globalspec.com