About: http://webisa.webdatacommons.org/439293723

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Following the depositing and planarizing process, the substrate may then be transferred to a polishing apparatus, such as described in FIG. 12, for planarizaion of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com