About: http://webisa.webdatacommons.org/439821927

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Low substrate temperatures have a further advantage particularly for materials such as gallium arsenide where high temperatures can lead to decomposition of the gallium arsenide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au