About: http://webisa.webdatacommons.org/449167692

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 28A and FIG. 28B are a plan view and a cross sectional view showing a phase shift mask according to a seventeenth embodiment of the present invention; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr