About: http://webisa.webdatacommons.org/44974561

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, in certain example embodiments of this invention, a substoichiometric ZnOx inclusive ceramic target is doped with a non-metal such as F and/or B (or alternatively a metal such as Al or the like).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com