About: http://webisa.webdatacommons.org/452013732

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Films nitrided at temperatures as low as 700??? C. formed TiN, as observed by x-ray diffraction, although resistivities were an order of magnitude higher than films prepared at 900??? C.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com