About: http://webisa.webdatacommons.org/452145816

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a cross section of a prior art PVD processing chamber using a screw clamped overspray shield;
http://www.w3.org/ns/prov#wasQuotedFrom	google.es