About: http://webisa.webdatacommons.org/45293407

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, processes such as sputtering or chemical vapor deposition (CVD) are commonly used to deposit layers of materials onto a substrate, and such methods are acceptable for use with this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es