About: http://webisa.webdatacommons.org/455922601

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that reactions other than deposition (e.g., etching, gettering, etc.) can take place in the downstream reaction chamber, depending on the application for the vapor phase reactant.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com