About: http://webisa.webdatacommons.org/456648030

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, several kinds of specimens were provided varying the plasma power, trimethoxysilane flow rate and N2O flow rate when forming P-TMS as the third insulative diffusion barrier layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au