About: http://webisa.webdatacommons.org/47794494

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4B is a partial plan view of a design structure of the groove-shaped via pattern forming region of the semiconductor device according to the present embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com