| http://www.w3.org/ns/prov#value | - The blocking layer can be formed from Al2 O3, AlN, SiO, Si02, a-Sil-x Cx (F,H)(0<X<1), a-SiNx (H) (0<X<4/3), a-C(H), fluorinated amorphous carbon (a-C(F)), a-C(H) and a-C(H,F) doped with elements belonging to the groups III and V of the periodic table, a-Si(H) doped with elements belonging to the groups III and V. The thickness of the blocking layer is preferably thin, such as 1 ??m or less.
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