About: http://webisa.webdatacommons.org/56508601

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is an example of a prior art method of calculating a critical dimension of a structure formed on a semiconductor wafer;
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com