| http://www.w3.org/ns/prov#value | - FIG. 11 is a graph showing the electromechanical coefficient KR 2 of Rayleigh waves as a function of the Euler angle ?? when IDT electrodes that are made of Al and have a normalized film thickness of about 16% are produced with grooves provided in LiNbO3 substrates with Euler angles (0???, ??, 0???), and SiO2 layers with various film thickness are formed on the substrates.
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