About: http://webisa.webdatacommons.org/57397074

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Removing the heat and deposition gas and purging the chamber with an appropriate gas, for example, N2 or Ar and another deposition could be such as Silicon Nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au