About: http://webisa.webdatacommons.org/60298356

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, low-k dielectric material 30 is a dielectric material having a dielectric constant, k, that is less than the dielectric constant of conventionally formed oxides.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com