About: http://webisa.webdatacommons.org/61498878

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The system we have considered here is a film that is subject to energetic Ar bombardment while it is formed by surface reactions of Si and O atoms separately supplied at low kinetic energies.
http://www.w3.org/ns/prov#wasQuotedFrom	worldwidescience.org