PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • exposing means including an illuminating portion for emitting an exposing light beam having characteristics which sensitize a resist layer of the circular substrate and a light receiving portion disposed to substantially confront the illuminating portion via the periphery of the circular substrate; and
http://www.w3.org/ns/prov#wasQuotedFrom
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