About: http://webisa.webdatacommons.org/63910878

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	m or tantalum nitride, etch stop or cap layers such as silicon nitride, silicon oxide or silicon oxycarbide, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com