About: http://webisa.webdatacommons.org/6408872

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Once lithography is completed, the resist, BARC and other coatings used for the lithography steps must be removed from the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au