About: http://webisa.webdatacommons.org/67432359

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The optical elements, such as lenses and mirrors, are made on the polysilicon plates 52 which are laid out on the polysilicon layers disposed on substrate 28.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com