About: http://webisa.webdatacommons.org/67870655

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The system 100 may include a number of process modules 102 for various processes such as chemical vapor deposition processes, etching processes, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com