About: http://webisa.webdatacommons.org/7359457

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a graph showing the final shape of the first sacrificial film after the etch-back.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com