About: http://webisa.webdatacommons.org/75804885

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The polysilicon layer 6 is covered with an insulating film 7 made of PSG (phosphor-silicate glass) on which metal such as aluminium is deposited to form a source electrode 8.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es