About: http://webisa.webdatacommons.org/76015848

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The number is a distance that roughly defines the size of the smallest feature on the chip.
http://www.w3.org/ns/prov#wasQuotedFrom	ibiblio.org