| http://www.w3.org/ns/prov#value | - In the wafer boat 58 of this embodiment, circular film thickness equalization plates 60 made of a material such as quartz are supported by grooves 12 formed at equal pitch in the three support columns 2 and are fixed integrally to each of the support columns 2 by fusing 62 (see FIG. 10).
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