PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • After a first micro-lens array 48??? is formed in substrate 40, a second layer 41 of a suitable material, for example, a same material as substrate 40, e.g. SiO2, is deposited over substrate 40 and first micro-lens array 48???.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com