About: http://webisa.webdatacommons.org/80603214

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other materials which can be used to form the barrier layer include by way of illustration, but are not limited to, the oxide and fluoride forms of magnesium and tantalum, as well as the fluoride forms of aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com