About: http://webisa.webdatacommons.org/80672534

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Etching is a common method of patterning a wide variety of materials used in the semiconductor industry.FIG. 8 shows a cross section of a portion of the reference pattern 50 formed using an underlying substrate 92.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com