About: http://webisa.webdatacommons.org/81180041

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, if the top pole layer has such a shape and is located in such a manner, the photoresist pattern is particularly susceptible to the rays reflected off the bottom electrode film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com