About: http://webisa.webdatacommons.org/84699315

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In turn, the silicon oxide film 22 except portions thereof present in the bottoms of the trenches 4 is etched back, whereby voids are provided in upper portions of the respective trenches 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com