About: http://webisa.webdatacommons.org/88264592

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic side sectional view of an RF ICP source with an inductor located inside the working chamber and equipped with a cooling system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es