About: http://webisa.webdatacommons.org/92466728

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, the top surface side of the sealing film is ground, and after the top surfaces of the columnar electrodes are exposed, the top surface of the sealing film including the top surfaces of the columnar electrodes is planarized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com