About: http://webisa.webdatacommons.org/95103312

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	What is needed, therefore, is a process and apparatus that reduces the time required to manufacture an integrated circuit by providing a sacrificial layer having improved etch rate characteristics and thickness uniformity.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com