About: http://webisa.webdatacommons.org/96267846

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	applied photo-resist corresponding to the electrodes 15, 16a and 16b are selectively removed, an electrode material such as Au is deposited by an electroplating to have a thickness t of 10 .mu.m, and finally the photo-resist is removed.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com