| http://www.w3.org/ns/prov#value | - depositing a layer including carbon having a generally diamond cubic crystallographic structure above a layer of polysilicon; depositing a layer of anti-reflective coating (ARC) material over the layer including carbon; removing a portion of the layer including diamond to form a mask feature; etching the layer of polysilicon according to the mask feature; and removing the mask feature. 10.
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