Premodifier: depositionHead noun: chamber
Same concepts |
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Broader concepts
label | provenance | confidence |
---|---|---|
vacuum deposition chamber | isap:431052978 | 0.741459 |
chamber | isap:431053031 | 0.620201 |
Narrower concepts
label | provenance | confidence |
---|---|---|
nitrogen n2 | isap:30627528 | 0.658694 |
chamber | isap:431053014 | 0.498822 |
cathode | isap:438855980 | 0.286501 |
cvd | isap:236162720 | 0.273404 |