About: deposition chamber

Premodifier: deposition
Head noun: chamber

Same concepts

Broader concepts

label	provenance	confidence
vacuum deposition chamber	isap:431052978	0.741459
chamber	isap:431053031	0.620201

Narrower concepts

label	provenance	confidence
nitrogen n2	isap:30627528	0.658694
chamber	isap:431053014	0.498822
cathode	isap:438855980	0.286501
cvd	isap:236162720	0.273404