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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • A third aspect of the present invention is a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, the treatment apparatus comprising a treatment chamber, a furnace disposed in the treatment chamber and adapted for heat-treating the workpiece contained in the carrier, an second air-tight carrier storage chamber disposed in the treatment chamber
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