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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • Over antifuse material layer 24 is preferably deposited second barrier metal layer 26 which is preferably formed either by collimated sputter deposition or by a blanket deposit of a barrier metal material such as W, TiW, TiWN, TiN, Ti, WSix, and combinations of the foregoing.
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