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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • Therefore, even when metal which can be anodically oxidized, such as Ta, Ti, Cr, or alloy mainly containing metal, such as Al, Ta, Ti, Cr is used, the same effect as that of the present embodiment can be obtained.
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