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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • In this embodiment, the atmosphere-side block 101 which is disposed on front side of the vacuum processing apparatus 100 is the part that performs handling tasks including wafer transfer and storage plus positioning at an ambient pressure whereas the vacuum-side block 102 on the back side is the processing block that performs wafer transfer and processing at a low pressure reduced from the ambient
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