About: isa:267258197   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • ng Cu on said at least one of said trench and said contact hole to form a conductive film; flowing the conductive film to fill said at least one of said trench and said contact hole by heat-treating said conductive film in an atmosphere with a reduced pressure, the atmosphere including at least an oxygen gas as an oxidizing gas and a hydrogen gas as a reducing gas to cause an exothermic reaction,
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software