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An Entity of Type :
prov:Entity
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wifo5-40.informatik.uni-mannheim.de:8890
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The passivation film 8 covers the entire surface of the substrate 1 except for portions where the contact holes 3c, 3d, 4c and 4d (FIG.5) are to be formed, and portions at which bonding pads 2a, 2b, 3a, 3b, 4a and 4b are to be formed.
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isap:435749878
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