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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • Generally, the space 18 above the metal layer 12 may be air or any other medium such as an extra metal layer, glass, Silicon, air etc. [0129] Also, local geometric deformations of an interface can be in the form of holes or modified regions.
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