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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • In this embodiment, n type impurities such as phosphorus or arsenic are ion-implanted at a dosage of 1.5???1016 /cm2 and at an implantation energy of 150 keV. Then, resist pattern 17 is removed and a thermal treatment is applied, whereby the impurities are activated.
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