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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • The layers 4??? and 5??? obtained of the donor wafer 10?????? are not necessarily identical to the layers 4 and 5 of the donor wafer 10, it being possible for the donor wafer shown in FIG. 7 d to act as a substrate for other types of layers.
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