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  • The dish 914 may also be coated with a reflective material, such as gold, to direct heat back to the heater plate 904. [0090] The heater plate 904 preferably has a large mass compared to the substrate being processed in the system and is preferably fabricated from a material such as silicon carbide, quartz, or other materials that do not react with any ambient gases in the RTA chamber 900 or with
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