About: http://webisa.webdatacommons.org/141098896

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 66B is a plan view for explaining the arrangement of the IGBT chips in the 15th embodiment;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com