About: http://webisa.webdatacommons.org/314583976

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In that case, there is a problem that evenness of film thickness is degraded, because degradation due to these processes is added on the distribution of film thickness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr